연구 Highlight

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  Effect of deposition temperature and surface reactions in atomic layer deposition of silicon oxide using Bis(diethylamino)silane and ozone

  • 저자명Hyeonsu Roh, Hye-Lee Kim, Khabib Khumaini, Heeju Son, Donggeon Shin, WonJun Lee
  • 저널명Applied Surface Science
  • 발표일2022-01-01
  • 내   용We investigated the effect of deposition temperature on the properties of the silicon oxide films pr...
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  Atomic layer deposition of tungsten and tungsten-based compounds using WCl5 and various reactants selected by density functional theory

  • 저자명Minyoung Lee, Romel Hidayat, Dip K. Nandi, Tae Hyun Kim, Yewon Kim, Seongyoon Kim, Won-Jun Lee, Soo-Hyun Kim
  • 저널명Applied Surface Science
  • 발표일2021-10-15
  • 내   용Atomic layer deposition (ALD) of metals and metal nitrides consist a major portion of the advanced t...
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  Gifts from Nature: Bio-Inspired Materials for Rechargeable Secondary Batteries

  • 저자명Chang-Heum Jo, Natalia Voronina, Yang-Kook Sun,* and Seung-Taek Myung*
  • 저널명Advanced materials
  • 발표일2021-08-01
  • 내   용Materials in nature have evolved to the most efficient forms and have adapted to various environment...
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  Density functional theory study on the modification of silicon nitride surface by fluorine-containing molecules

  • 저자명Tanzia Chowdhury, Romel Hidayat, Hye-Lee Kim, Tirta Rona Mayangsari, Seongjae Cho, Sangjoon Park, Jongwan Jung, Won-Jun Lee
  • 저널명Applied Surface Science
  • 발표일2021-07-15
  • 내   용Gaseous fluorine-containing molecules are crucial for controlled etching in semiconductor industries...
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  Process Steps for High Quality Si-Based Epitaxial Growth at Low Temperature via RPCVD

  • 저자명Jongwan Jung, Baegmo Son, Byungmin Kam, Yong Sang Joh, Woonyoung Jeong, Seongjae Cho, Won-Jun Lee, Sangjoon Park
  • 저널명Materials
  • 발표일2021-07-03
  • 내   용The key process steps for growing high-quality Si-based epitaxial films via reduced pressure chemica...
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  Surface reaction of the hafnium precursor with a linked amido-cyclopentadienyl ligand: A density functional theory study

  • 저자명Romel Hidayat, Hye-Lee Kim, Hohoon Kim, Younghun Byun, Jongsoo Lee, Won-Jun Lee
  • 저널명Journal of Vacuum Science & Technology A
  • 발표일2021-03-23
  • 내   용We studied heteroleptic Hf precursors with a linked amido-cyclopentadienyl ligand by density functio...
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  Transition from perovskite to misfit-layered structure materials: a highly oxygen deficient and stable oxygen electrode catalyst

  • 저자명Muhammad Saqib, In-Gyu Choi, Hohan Bae, Kwangho Park, Ji-Seop Shin, You-Dong Kim, John-In Lee, Minkyeong Jo, Yeong-Cheol Kim, Kug-Seung Lee, Sun-Ju Song, Eric D Wachsman, Jun-Young Park
  • 저널명Energy & Environmental Science
  • 발표일2021-03-11
  • 내   용Despite the recent substantial progress in reversible protonic ceramic cells (RPCCs) it remains esse...
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  Density functional theory study on the reducing agents for atomic layer deposition of tungsten using tungsten chloride precursor

  • 저자명Romel Hidayat , Tanzia Chowdhury , Yewon Kim , Seongyoon Kim , Tirta Rona Mayangsari , Soo-Hyun Kim , Won-Jun Lee
  • 저널명Applied Surface Science
  • 발표일2021-02-01
  • 내   용We studied co-reactants for tungsten chloride precursors by density functional theory calculation to...
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  Reactivity of different nitriding agents with chlorine-terminated surface during atomic layer deposition of silicon nitride

  • 저자명Tirta Rona Mayangsari , Luchana Lamierza Yusup , Romel Hidayat , Tanzia Chowdhury , Young-Kyun Kwon , Won-Jun Lee
  • 저널명Applied Surface Science
  • 발표일2021-01-01
  • 내   용The atomic layer deposition (ALD) of silicon nitride using silicon chloride was simulated by density...
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  Mechanical analysis of a flexible microelectronic system under twisting stress

  • 저자명Cha-Hee Kim, Jae-Min Kim, Seung-Ho Seo, Jae-Hak Lee, Jun-Yeob Song, Won-Jun Lee
  • 저널명Journal of Vacuum Science & Technology B
  • 발표일2020-11-30
  • 내   용We modeled flexible microelectronic systems, in which a thinned silicon die is flip-chip bonded to a...

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